CF Flange Pneumatic High Vacuum Angle Valves: Overview, Structural Features & Main Performance Indicators

The CF Flange Pneumatic High Vacuum Angle Valve is suitable for opening and closing pipelines in ultra-high vacuum systems and adopts a pneumatic drive mode. It has the advantages of stable operation, reliable use, excellent sealing performance and long service life, making it one of the preferred valves for ultra-high vacuum equipment. The pneumatic valve uses compressed air as power to open or close the valve plate; when the air supply is lost, the valve plate will automatically close relying on spring force. The valve medium is air and a few corrosive gases.

Structural Features

• Standardized and modular design, easy to replace and maintain;

• Easy-to-clean design;

• Shaft seal is bellows seal, other sealing elements are fluororubber, lubricant-free design;

• The valve body adopts internal stainless steel welding with low leak rate;

Main Performance Indicators

• Applicable Range: 1×10⁻⁶Pa～1.2×10⁵Pa

• Pressure Difference on Valve Plate When Open: ≤1.2×10⁵Pa in Any Direction (Note: Corrected "a" to "Pa" for unit accuracy)

• Leak Rate of Valve Body and Valve Seat: ＜1.3×10⁻⁷Pa·L·s⁻¹

• First Maintenance Cycle: 800,000 Cycles

• Valve Body Baking Temperature: ≤200℃ When Open; ≤150℃ When Closed

• Installation Position: Arbitrary

• Power Supply: AC 220V 50Hz, 6W or DC 24V, 3W (Special Specifications Can Be Customized)

• Compressed Air: 0.4～0.7MPa

• Valve Opening and Closing Time: ≤1s

• Valve Position Indication: Pneumatic Drive: Equipped with Opening and Closing Position Indicator Switch (Magnetic Switch)