High Vacuum Angle Valves
High vacuum angle valves are used to connect or cut off the air flow in ultra‑high vacuum system pipelines, with two driving modes: pneumatic and manual. The pneumatic valve controls cylinder movement through the electromagnetic directional valve to switch air flow direction, realizing valve opening and closing. The manual valve is opened and closed by manual handle rotation via thread transmission. It is applicable for working media of air and non‑corrosive gases.

Structural Design
The high vacuum baffle valve adopts a normally closed single‑acting design to achieve constant‑pressure sealing, enabling stable application in complex customer system structures without leakage.
‑ The integrated high‑extrusion molded valve body made of aluminum alloy or stainless steel features high strength, high hardness and excellent corrosion resistance, greatly extending the service life of the valve.
‑ Adopting a long‑life stainless steel bellows structure, it isolates the outgassing of the internal O‑ring in a vacuum environment, meeting ultra‑high vacuum degree requirements.
‑ Equipped with high‑performance fluororubber sealing rings to satisfy high‑quality and long‑service‑life design standards.
‑ The full series adopts copper and zinc‑free design, which can meet the high‑standard application requirements of lithium battery, semiconductor and other industries.
SPECIFICATIONS
| Item | Parameter |
| Application Range | 10‑5 Pa ~ 10‑6 Pa |
| Leak Rate | ≤1.3×10‑10 Pa·m³/s |
| Working Media | Air, Vapor, Non‑corrosive gases |
| Baking Temperature | On state: ≤200℃; Off state: ≤150℃ |
| Compressed Air Pressure | 0.4 ~ 0.7MPa |
| Power Supply | AC220V 50Hz, 6W or DC24V, 3W (Optional) |
| Mounting Position | Arbitrary |
| Valve Position Indication | Manual type: Equipped with stroke control pin Pneumatic type: Equipped with magnetic switch for opening and closing position indication |
| Note | Valves for 10‑7 Pa vacuum environment can be customized. |
Main Component Materials
| Component | Material |
| Valve Body, Valve Rod | Stainless Steel 304 |
| Valve Deck | Aluminum Alloy, Stainless Steel 304 |
| Seals | Viton, Welded Bellows (316L) |
Ultrahigh Vacuum Manual Angle Valve

Connection Type: KF Flange (DN≤50), CF Flange (DN≤50)
Overall Dimensions of Ultrahigh Vacuum Manual Angle Valve (KF Flange, Unit: mm)
| Model | DN | H | B | C | D |
| CD‑JB16KF | 16 | 103 | 35 | 35 | 30 |
| CD‑JB25KF | 25 | 119 | 45 | 45 | 40 |
| CD‑JB40KF | 40 | 139 | 55 | 55 | 55 |
| CD‑JB50KF | 50 | 180.5 | 65 | 65 | 75 |
Overall Dimensions of Ultrahigh Vacuum Manual Angle Valve (CF Flange, Unit: mm)
Flange Standard: GB 6071
| Model | DN | H | B | C | D | D0 | E‑∅F | Flange Standard |
| CD‑JB16CF | 16 | 108 | 40 | 40 | 34 | 27 | 6‑∅4.3 | GB 6071 |
| CD‑JB25CF | 25 | 129 | 55 | 55 | 54 | 43 | 6‑∅6.6 | GB 6071 |
| CD‑JB35CF | 35 | 147 | 63 | 63 | 70 | 58.7 | 6‑∅6.6 | GB 6071 |
| CD‑JB50CF | 50 | 195.5 | 80 | 80 | 86 | 72.4 | 8‑∅8.5 | GB 6071 |
Notes:
1. Flanges can be customized according to customer requirements.
2. J stands for angle valve; B stands for welded bellows shaft seal structure.

















