High Vacuum Solenoid Valves
High Vacuum Solenoid Valve is a special valve installed on mechanical vacuum pumps, which realizes on-off control of vacuum pipelines through electromagnetic actuation. The device adopts normally closed or normally open working mode, and uses medium pressure difference to complete opening and closing action. It features zero leakage, explosion-proof design and corrosion resistance.

Technical Parameters
| Working Fluid | Air, vacuum, inert gas |
| Fluid Temperature | 5~55℃ |
| Ambient Temperature | 0~55℃ (no freezing allowed) |
| Maximum Internal Leak Rate | 1.0×10-9Pa·m3/s He |
| External Leakage | Below 1.0×10-9Pa·m3/s He |
| Voltage Fluctuation Range | DC24V±10% |
| Valve Structure | Direct acting lift structure |
| Durability | 2 million cycles |
| Operating Environment | Non-explosive and non-corrosive environment |
Working Principle
High Vacuum Solenoid Valve is a 2/2-way automatic valve controlled by AC or DC power supply, mainly used in vacuum pipelines or linkage control systems with vacuum pumps. It is directly operated by electromagnet to control valve opening and closing for venting and filling vacuum vessels to realize automatic or remote control. The electromagnetic coil drives the pilot spool of High Vacuum Solenoid Valve to form a double balance structure for rapid opening and closing.
For normally closed type, electromagnetic force lifts the armature when energized and drives the main spool to open the medium passage.
After power off, the spring resets to close the valve, and medium pressure difference enhances sealing performance.
The normally open type adopts reverse design and keeps open when power is cut off.
Structural Design
According to operating modes, the spool structures of High Vacuum Solenoid Valve mainly include direct acting type, pilot operated type and kick type (no pressure difference type). Among them, seat valve and diaphragm spool structures are suitable for vacuum environment due to excellent sealing performance and no lubrication requirement.
Application Fields
High Vacuum Solenoid Valve is widely used in vacuum forming, packaging equipment and siphon water supply systems of food processing, metallurgical equipment and other industrial fields. It is also applied in aerospace, military industry, nuclear industry, shipbuilding, petrochemical industry, electric power, machinery, medical treatment, air conditioning, building engineering, cleaning, water treatment and other industries.

















